Mainly used for sintering silicon nitride ceramic substrate.
1. double layer shell design with built-in water cooling jacket,
furnace shell of 16MnR pressure vessel steel.
2. Heating element of isostatic graphite rod, electric resistance heating.
3 Gas-in system owns relief valve and pressure relay, reliable and safe
4. Automatic control mode of PLC plus touching screen.
5. A fast cooling blower equipped with the end of furnace accelerates the cooling of furnace.
Main technical parameters:
4. Final vacuum: 1Pa.
Furnace can be customized on your request.